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Author: Admin | 2025-04-27
Semiconductor materials, dielectric materials and conducting materials in the form of thin film on a certain substrate [7–9]. The primary application of TFT is in display products such as liquid crystal display (LCD) and organic light-emitting diode (OLED) which are based on active matrix (AM) [10, 11]. TFT is widely used in the manufacture of active matrix liquid crystal display (AMLCD), occupying the largest segment of output of the panel display industry. In the meantime, active matrix organic light-emitting diode (AMOLED) is in rapid development. Generally speaking, TFT used in AMLCD and AMOLED can be made by using a very wide variety of semiconducting materials, but commonly used material is silicon including single crystalline silicon, microcrystalline silicon, low temperature polysilicon (LTPS) and amorphous silicon. Facing the advent of next generation display technologies, there are still some disadvantages existing in current silicon based TFT for display. To begin with, amorphous silicon based TFTs have relatively inadequate mobility, lower than 1 cm2 V−1 · s−1, limiting the operating speed of TFT devices as higher mobility could lead to high current which makes capacitive loads quickly charged or discharged [12, 13]. Besides, though LTPS based TFTs possess mobility about 100 cm2 V−1 · s−1, the existence of lots of grain boundaries leads to the difference of electrical characteristics between TFT units [14, 15]. What's more, silicon based TFTs are opaque to visible light and temperature of deposition is generally high, not applicable to the trend of transparent display and flexible panels. By using
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